Achieving Zero Leakage, Ultralong Lifespan, and Intrinsic Opening Sensing in Microvalves Through Structural Superlubrication and Triboelectric Nanogenerator Technologies

Abstract

Abstract Valves are critical components in advanced fluid control systems (AFCS) and play a vital role in applications such as soft robotics and medical devices. Traditional mechanical valves often suffer from issues such as leakage and wear, which compromise the efficiency and precision of air‐driven systems. Here, a superlubricity microvalve (SLMV) is developed with characteristics of zero leakage, ultralong lifespan, and self‐sensing capabilities. The SLMV demonstrates zero helium leakage at pressures exceeding 0.9 MPa, and remains defect‐free after one million collision tests and 5000 reciprocating sliding friction tests. Additionally, the valve features self‐powered sensing that can detect its own open status, and thus enhances the self‐feedback control. AFCS equipped with SLMVs may significantly improve the flexibility and functionality of pneumatic robots, facilitating the development of implantable drug delivery devices that are more durable, compact, safe, and reliable.